Invention Grant
- Patent Title: Imprint method and imprint mold manufacturing method
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Application No.: US16543718Application Date: 2019-08-19
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Publication No.: US11353789B2Publication Date: 2022-06-07
- Inventor: Takaharu Nagai , Yuichi Inazuki , Katsutoshi Suzuki , Ryugo Hikichi , Koji Ichimura , Saburou Harada
- Applicant: DAI NIPPON PRINTING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: DAI NIPPON PRINTING CO., LTD.
- Current Assignee: DAI NIPPON PRINTING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-162171 20140808
- Main IPC: G03F7/00
- IPC: G03F7/00 ; H01L21/027 ; B29C59/02 ; B29C35/08

Abstract:
An imprint method using a mold and/or a transfer substrate having a mesa structure includes a resin supply step, a contact step, a curing step, and a mold release step. In the resin supply step, a balance layer is formed by supplying a molded resin also to an area outside of a pattern formation area of the transfer substrate in which a pattern structure is to be formed.
Public/Granted literature
- US20190384169A1 IMPRINT METHOD AND IMPRINT MOLD MANUFACTURING METHOD Public/Granted day:2019-12-19
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