Invention Grant
- Patent Title: Conformal stage
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Application No.: US16956617Application Date: 2018-12-21
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Publication No.: US11353800B2Publication Date: 2022-06-07
- Inventor: J. Casey Donaher , Edward J. Ficarra , Christopher J. McLaughlin
- Applicant: Onto Innovation, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Onto Innovation, Inc.
- Current Assignee: Onto Innovation, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Schwegman Lundberg & Woessner, P.A.
- International Application: PCT/US2018/066991 WO 20181221
- International Announcement: WO2019/133457 WO 20190704
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/683 ; H01L21/687
Abstract:
An improved stage for the processing of large, thin substrates, such as glass and semiconductor panels. Processing includes lithography, inspection, metrology, grinding, and the like. The stage includes a chuck that moves over a base relative to a device for processing a substrate. The chuck conforms to a geometry of the base while moving relative to the base.
Public/Granted literature
- US1243711A Adjustable chain-tightener. Public/Granted day:1917-10-23
Information query
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