Invention Grant
- Patent Title: Line-based endpoint detection
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Application No.: US16917727Application Date: 2020-06-30
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Publication No.: US11355313B2Publication Date: 2022-06-07
- Inventor: Brian Routh, Jr. , Brad Larson , Aditee Shrotre , Oleg Sidorov
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/31 ; G01N23/2251

Abstract:
Apparatuses and methods directed toward endpoint detection are disclosed herein. An example method at least includes forming a plurality of lines on a top surface of a sample; removing, a plurality of times, material from a working surface of the sample, the working surface different than the top surface; imaging, a plurality of times, the sample to at least capture the plurality of lines; and determining an endpoint based on a relative spatial characteristic between two or more lines of the plurality of lines.
Public/Granted literature
- US20210407765A1 LINE-BASED ENDPOINT DETECTION Public/Granted day:2021-12-30
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