Invention Grant
- Patent Title: Method for producing ceramic substrate, and ceramic substrate
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Application No.: US16630073Application Date: 2018-08-23
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Publication No.: US11355355B2Publication Date: 2022-06-07
- Inventor: Ji-Hyung Lee , Ik-Seong Park , Hyeon-Choon Cho
- Applicant: Amosense Co., Ltd.
- Applicant Address: KR Cheonan-si
- Assignee: Amosense Co., Ltd.
- Current Assignee: Amosense Co., Ltd.
- Current Assignee Address: KR Cheonan-si
- Agency: Brooks, Cameron & Huebsch, PLLC
- Priority: KR10-2017-0107002 20170824,KR10-2018-0098396 20180823
- International Application: PCT/KR2018/009722 WO 20180823
- International Announcement: WO2019/039883 WO 20190228
- Main IPC: H01L21/48
- IPC: H01L21/48 ; H01L23/373 ; H01L41/332

Abstract:
The present invention relates to a method of producing a ceramic substrate, the method including: joining a metal layer to each of opposite surfaces of a ceramic base material; forming, on the metal layers, a first electrode layer and a second electrode layer having a larger volume than the first electrode layer; calculating the volumes of the first and second electrode layers; and controlling a thickness of the second electrode layer, thereby controlling warpage which may occur due to a difference between the volumes of the first and second electrode layers. The present invention can reduce the defect rate of a ceramic substrate by controlling warpage that may occur due to the difference in volume taken up by the metal layers on the opposite surfaces of the base material.
Information query
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