- Patent Title: Laser treatment device rectifier device and laser treatment device
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Application No.: US15769721Application Date: 2016-10-25
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Publication No.: US11355364B2Publication Date: 2022-06-07
- Inventor: Daisuke Ito , Junichi Shida
- Applicant: JSW AKTINA SYSTEM CO., LTD.
- Applicant Address: JP Yokohama
- Assignee: JSW AKTINA SYSTEM CO., LTD.
- Current Assignee: JSW AKTINA SYSTEM CO., LTD.
- Current Assignee Address: JP Yokohama
- Agency: Holtz, Holtz & Volek PC
- Priority: JPJP2015-209516 20151026
- International Application: PCT/JP2016/081580 WO 20161025
- International Announcement: WO2017/073561 WO 20170504
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B23K26/14 ; B23K26/142 ; C03B25/02 ; B23K26/073 ; B23K26/08 ; B23K26/352 ; B23K26/0622 ; B23K26/354 ; H01L21/02 ; B23K103/00 ; B23K101/40 ; B23K101/18

Abstract:
A laser treatment device performing treatment by irradiating a target object having a plate surface with laser light, including: a light-transmitting region transmitting laser light emitted onto the target object; a rectifier that has a rectifier surface separated from the target object and extending along the plate surface of the target object and outward from the end of the light-transmitting region; a gas supply unit that feeds a gas to a gap between one side of the rectifier surface and the light-transmitting region, in a position separated from the light-transmitting region; and a gas exhaust unit that exhausts, on the other side that is on the other side of the light-transmitting region from the one side, the gas present in a gap between the rectifier surface and the target object from the gap, in a position separated from the light-transmitting region, thereby generating a stable local gas atmosphere.
Public/Granted literature
- US20180315627A1 LASER TREATMENT DEVICE RECTIFIER DEVICE AND LASER TREATMENT DEVICE Public/Granted day:2018-11-01
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