• Patent Title: Wafer storage container
  • Application No.: US15775359
    Application Date: 2018-04-02
  • Publication No.: US11355371B2
    Publication Date: 2022-06-07
  • Inventor: Bum Je Woo
  • Applicant: Bum Je Woo
  • Applicant Address: KR Seongnam
  • Assignee: Bum Je Woo
  • Current Assignee: Bum Je Woo
  • Current Assignee Address: KR Seongnam
  • International Application: PCT/KR2018/003877 WO 20180402
  • International Announcement: WO2019/194327 WO 20191010
  • Main IPC: H01L21/673
  • IPC: H01L21/673
Wafer storage container
Abstract:
The present invention relates to a wafer storage container capable of removing fumes on a wafer or removing moisture therefrom by supplying purge gas to the wafer stored in a storage chamber. More particularly, the present invention relates to a wafer storage container capable of quickly blocking an injection hole and an exhaust hole and of preventing contaminants from flowing into a storage chamber upon the blocking of the exhaust hole.
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