Invention Grant
- Patent Title: Wafer storage container
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Application No.: US15775359Application Date: 2018-04-02
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Publication No.: US11355371B2Publication Date: 2022-06-07
- Inventor: Bum Je Woo
- Applicant: Bum Je Woo
- Applicant Address: KR Seongnam
- Assignee: Bum Je Woo
- Current Assignee: Bum Je Woo
- Current Assignee Address: KR Seongnam
- International Application: PCT/KR2018/003877 WO 20180402
- International Announcement: WO2019/194327 WO 20191010
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
The present invention relates to a wafer storage container capable of removing fumes on a wafer or removing moisture therefrom by supplying purge gas to the wafer stored in a storage chamber. More particularly, the present invention relates to a wafer storage container capable of quickly blocking an injection hole and an exhaust hole and of preventing contaminants from flowing into a storage chamber upon the blocking of the exhaust hole.
Public/Granted literature
- US20210166962A1 WAFER STORAGE CONTAINER Public/Granted day:2021-06-03
Information query
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