Invention Grant
- Patent Title: Interconnect strucutre with protective etch-stop
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Application No.: US16876465Application Date: 2020-05-18
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Publication No.: US11355390B2Publication Date: 2022-06-07
- Inventor: Shao-Kuan Lee , Hai-Ching Chen , Hsin-Yen Huang , Shau-Lin Shue , Cheng-Chin Lee
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/535 ; H01L23/532

Abstract:
In some embodiments, the present disclosure relates to an integrated chip. The integrated chip may comprise a first metal line disposed over a substrate. A via may be disposed directly over a top of the first metal line and the via may comprise a first lower surface and a second lower surface above the first lower surface. A first dielectric structure may be disposed laterally adjacent to the first metal line and may be disposed along a sidewall of the first metal line. A first protective etch-stop structure may be disposed directly over a top of the first dielectric structure and the first protective etch-stop structure may vertically separate the second lower surface of the via from the top of the first dielectric structure.
Public/Granted literature
- US20210358803A1 INTERCONNECT STRUCUTRE WITH PROTECTIVE ETCH-STOP Public/Granted day:2021-11-18
Information query
IPC分类: