Invention Grant
- Patent Title: Nanoparticle matrix for backside heat spreading
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Application No.: US16586720Application Date: 2019-09-27
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Publication No.: US11355414B2Publication Date: 2022-06-07
- Inventor: Benjamin Stassen Cook , Nazila Dadvand , Daniel Lee Revier , Archana Venugopal
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Valerie M. Davis; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L23/373
- IPC: H01L23/373 ; H01L23/00 ; H01L23/498 ; H01L21/48 ; H01L21/285

Abstract:
In described examples, a circuit (e.g., an integrated circuit) includes a semiconductor substrate that includes a frontside surface and a backside surface. A circuit element is included at the frontside surface. An optional electrical insulator layer can be included adjacent to the backside surface. A distributor layer is included adjacent to the backside surface. In some examples, the distributor layer includes a distributor material that includes a matrix of cohered nanoparticles and metallic particles embedded by the cohered nanoparticles.
Public/Granted literature
- US20210098331A1 NANOPARTICLE MATRIX FOR BACKSIDE HEAT SPREADING Public/Granted day:2021-04-01
Information query
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