Invention Grant
- Patent Title: Structure and joined composite
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Application No.: US17007087Application Date: 2020-08-31
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Publication No.: US11355416B2Publication Date: 2022-06-07
- Inventor: Yumi Fukuda , Koichi Harada , Yasushi Hattori , Maki Yonetsu , Kenji Essaki , Keiko Albessard , Yasuhiro Goto
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner L.L.P.
- Priority: JPJP2020-048712 20200319
- Main IPC: H01L23/373
- IPC: H01L23/373

Abstract:
A structure includes: a β silicon nitride crystal phase; and a Y2MgSi2O5N crystal phase. The structure gives a X-ray diffraction pattern by a θ-2θ method, the pattern having a ratio of a peak intensity of a (22-1) plane of the Y2MgSi2O5N crystal phase to a peak intensity of a (200) plane of the β silicon nitride crystal phase, the peak intensity of the (200) plane being determined at a position of 2θ=27.0±1°, the peak intensity of the (22-1) plane being determined at a position of 2θ=30.3±1°, and the ratio being 0.001 or more and 0.01 or less.
Public/Granted literature
- US20210296205A1 STRUCTURE AND JOINED COMPOSITE Public/Granted day:2021-09-23
Information query
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