Invention Grant
- Patent Title: Three-dimensional memory device including bump-containing bit lines and methods for manufacturing the same
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Application No.: US16984700Application Date: 2020-08-04
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Publication No.: US11355437B2Publication Date: 2022-06-07
- Inventor: Zhixin Cui , Yukihiro Sakotsubo
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/535 ; H01L27/11582 ; H01L23/522 ; H01L21/768 ; H01L25/065 ; H01L25/18 ; H01L23/00 ; H01L25/00 ; H01L27/11556

Abstract:
A semiconductor die can include an alternating stack of insulating layers and electrically conductive layers located on a substrate, memory stack structures extending through the alternating stack, drain regions located at a first end of a respective one of the vertical semiconductor channels of a memory stack structure, and bit lines extending over the drain regions and electrically connected to a respective subset of the drain regions. At least of a subset of the bit lines includes bump-containing bit lines. Each of the bump-containing bit lines includes a line portion and a bump portion that protrudes upward from a top surface of the line portion by a bump height. Bit line contact via structures overlie the bit lines and contact a bump portion of a respective one of the bump-containing bit lines.
Information query
IPC分类: