Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16267203Application Date: 2019-02-04
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Publication No.: US11355441B2Publication Date: 2022-06-07
- Inventor: Kazushiro Nomura , Mie Matsuo
- Applicant: KABUSHIKI KAISHA TOSHIBA , TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Applicant Address: JP Tokyo; JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee: KABUSHIKI KAISHA TOSHIBA,TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
- Current Assignee Address: JP Tokyo; JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JPJP2018-052031 20180320
- Main IPC: H01L23/538
- IPC: H01L23/538 ; H01L23/532 ; H01L27/146

Abstract:
A semiconductor device according to an embodiment includes a first substrate including a first insulating layer, a first conductive layer provided in the first insulating layer, a first metal layer provided in the first insulating layer, and a second metal layer provided between the first metal layer and the first conductive layer, a linear expansion coefficient of the second metal layer being higher than that of the first metal layer; and a second substrate including a second insulating layer, and a third metal layer provided in the second insulating layer, in contact with the first metal layer. The second substrate contacts with the first substrate.
Public/Granted literature
- US20190295954A1 SEMICONDUCTOR DEVICE Public/Granted day:2019-09-26
Information query
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