Invention Grant
- Patent Title: Embedding magnetic material, in a cored or coreless semiconductor package
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Application No.: US15982652Application Date: 2018-05-17
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Publication No.: US11355459B2Publication Date: 2022-06-07
- Inventor: Kyu-Oh Lee , Sai Vadlamani , Rahul Jain , Junnan Zhao , Ji Yong Park , Cheng Xu , Seo Young Kim
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/60
- IPC: H01L23/60 ; H01L23/64 ; H01L23/498 ; H01L21/48 ; H01L23/00 ; H01F1/12 ; H01F41/14

Abstract:
Techniques for fabricating a semiconductor package having magnetic materials embedded therein are described. For one technique, fabrication of package includes: forming a pad and a conductive line on a build-up layer; forming a raised pad structure on the build-up layer, the raised pad comprising a pillar structure on the pad; encapsulating the conductive line and the raised pad structure in a magnetic film comprising one or more magnetic fillers; planarizing a top surface of the magnetic film until top surfaces of the raised pad structure and the magnetic film are co-planar; depositing a primer layer on the top surfaces; removing one or more portions of the primer layer above the raised pad structure to create an opening; and forming a via in the opening on the raised pad structure. The primer layer may comprise one or more of a build-up layer, a photoimageable dielectric layer, and a metal mask.
Public/Granted literature
- US20190355675A1 EMBEDDING MAGNETIC MATERIAL IN A CORED OR CORELESS SEMICONDUCTOR PACKAGE Public/Granted day:2019-11-21
Information query
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