Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US17000545Application Date: 2020-08-24
-
Publication No.: US11355511B2Publication Date: 2022-06-07
- Inventor: Tsunehiro Ino , Akira Takashima , Reika Tanaka
- Applicant: Kioxia Corporation
- Applicant Address: JP Minato-ku
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-049900 20200319
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L29/66 ; H01L27/1157 ; H01L27/11565

Abstract:
A semiconductor memory device of an embodiment includes: a semiconductor layer; a gate electrode layer; a first insulating layer provided between the semiconductor layer and the gate electrode layer; a second insulating layer provided between the first insulating layer and the gate electrode layer; and an intermediate layer provided between the first insulating layer and the second insulating layer, the intermediate layer containing a first crystal of a space group Pbca (space group number 61), a space group P42/nmc (space group number 137), or a space group R-3m (space group number 166), and the intermediate layer containing hafnium (Hf), oxygen (O), and nitrogen (N).
Public/Granted literature
- US20210296326A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-09-23
Information query
IPC分类: