Invention Grant
- Patent Title: Device integrated with three-dimensional MIM capacitor and method for making the same
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Application No.: US16999498Application Date: 2020-08-21
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Publication No.: US11355579B2Publication Date: 2022-06-07
- Inventor: Junwen Liu
- Applicant: HUA HONG SEMICONDUCTOR (WUXI) LIMITED
- Applicant Address: CN Wuxi
- Assignee: HUA HONG SEMICONDUCTOR (WUXI) LIMITED
- Current Assignee: HUA HONG SEMICONDUCTOR (WUXI) LIMITED
- Current Assignee Address: CN Wuxi
- Agency: MKG, LLC
- Priority: CN201911324559.9 20191220
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L49/02

Abstract:
The present application relates to the technical field of semiconductor manufacturing, in particular to a device integrated with a three-dimensional MIM capacitor and a method for manufacturing the same. The device comprising: a first dielectric layer, a first conductive metal structure being formed in the first dielectric layer; and a second dielectric layer, plurality of MIM capacitors being formed in the second dielectric layer, the bottom of each of the MIM capacitors being connected to the first conductive metal structure, and the plurality of three-dimensional MIM capacitors being arranged as array in a two-dimensional plane presented by the second dielectric layer; wherein each of the three-dimensional MIM capacitors sequentially comprises an upper electrode, a dielectric layer covering the bottom sides of the upper electrode, and a lower electrode layer covering an outer surface of the dielectric layer; the lower electrode layer is connected to the first conductive metal structure.
Public/Granted literature
- US20210193792A1 DEVICE INTEGRATED WITH THREE-DIMENSIONAL MIM CAPACITOR AND METHOD FOR MAKING THE SAME Public/Granted day:2021-06-24
Information query
IPC分类: