Invention Grant
- Patent Title: Method of manufacturing nitride semiconductor light emitting element
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Application No.: US16874123Application Date: 2020-05-14
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Publication No.: US11355662B2Publication Date: 2022-06-07
- Inventor: Hiroki Kondo
- Applicant: NICHIA CORPORATION
- Applicant Address: JP Anan
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan
- Agency: Foley & Lardner LLP
- Priority: JPJP2019-098426 20190527
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/32 ; H01L33/02 ; H01L33/06

Abstract:
A method of manufacturing a nitride semiconductor light emitting element includes: growing an n-side nitride semiconductor layer; growing an active layer on the n-side nitride semiconductor layer; and growing a p-side nitride semiconductor layer on the active layer, which includes: growing a first p-side nitride semiconductor layer, growing a second p-side nitride semiconductor layer, growing a third p-side nitride semiconductor layer, and growing a fourth p-side nitride semiconductor layer, while varying flow rates of an Al source gas, a Ga source gas, an N source gas, and a Mg source gas.
Public/Granted literature
- US20200381580A1 METHOD OF MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT EMITTING ELEMENT Public/Granted day:2020-12-03
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