Invention Grant
- Patent Title: Electromechanical transducer, liquid discharge head, liquid discharge apparatus, and method for manufacturing electromechanical transducer
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Application No.: US16047367Application Date: 2018-07-27
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Publication No.: US11355693B2Publication Date: 2022-06-07
- Inventor: Naoya Kondo , Satoshi Mizukami , Toshiaki Masuda
- Applicant: RICOH COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Xsensus LLP
- Priority: JPJP2017-149293 20170801
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/09 ; H01L41/43 ; C01G25/00 ; B41J2/14 ; C01G23/00 ; H01L41/318 ; H01L41/08 ; H01L41/257

Abstract:
An electromechanical transducer includes an electromechanical transducer film of laminated layers including a perovskite-type complex oxide represented by a general formula of ABO3; and a pair of electrodes opposed to each other with the electromechanical transducer film interposed between the pair of electrodes. In the general formula of ABO3, A includes Pb and B includes Zr and Ti. A variable ratio ΔPb of Pb, determined by Pb(max)−Pb(min), is 6% or less and a variable ratio ΔZr of Zr, determined by Zr(max)−Zr(min), is 9% or less, where an atomic weight ratio of Pb in the electromechanical transducer film is denoted by Pb/B, an atomic weight ratio of Zr in the electromechanical transducer film is denoted by Zr/B, a maximum value and a minimum value of the atomic weight ratio of Pb in a film thickness direction of the electromechanical transducer film are denoted by Pb(max) and Pb(min), respectively, and a maximum value and a minimum value of the atomic weight ratio of Zr in the film thickness direction of the electromechanical transducer film are denoted by Zr(max) and Zr(min), respectively.
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