Semiconductor manufacturing system and server device
Abstract:
A semiconductor manufacturing system according to an embodiment includes: a controller configured to control a semiconductor manufacturing apparatus; and a server configured to bidirectionally communicate with the controller via a communication line. The server includes a first processor configured to: transmit a backup file creation request (signal) that sets data specific to each controller as a backup file and transmit a backup file acquisition request (signal) requesting acquisition of the created backup file; and receive the created backup file. The controller includes a second processor configured to: receive a request (signal) from the server; and create the backup file when receiving the backup file creation request (signal).
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