Invention Grant
- Patent Title: Filter coupling device and substrate treating apparatus provided therewith
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Application No.: US15905990Application Date: 2018-02-27
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Publication No.: US11358076B2Publication Date: 2022-06-14
- Inventor: Masahito Kashiyama , Toshiya Kuwahara
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Ostrolenk Faber LLP
- Priority: JPJP2017-054420 20170321
- Main IPC: B01D29/96
- IPC: B01D29/96 ; B01D35/30 ; H01L21/687 ; H01L21/67 ; B01D35/02

Abstract:
Disclosed is a filter coupling device having joint members, a base plate, a filter holder, a rotation shaft, and a leg. The filter holder allows support of a first filter and a second filter. The rotation shaft is connected with the filter holder. The filter holder takes a first attitude and a second attitude by rotating around the rotation shaft. The filter holder includes a first filter holder configured to support the first filter in the first attitude, and a second filter holder configured to support the second filter in the second attitude.
Public/Granted literature
- US20180272257A1 FILTER COUPLING DEVICE AND SUBSTRATE TREATING APPARATUS PROVIDED THEREWITH Public/Granted day:2018-09-27
Information query
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