Filter coupling device and substrate treating apparatus provided therewith
Abstract:
Disclosed is a filter coupling device having joint members, a base plate, a filter holder, a rotation shaft, and a leg. The filter holder allows support of a first filter and a second filter. The rotation shaft is connected with the filter holder. The filter holder takes a first attitude and a second attitude by rotating around the rotation shaft. The filter holder includes a first filter holder configured to support the first filter in the first attitude, and a second filter holder configured to support the second filter in the second attitude.
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