Invention Grant
- Patent Title: Cleaning liquid supply device, cleaning unit, and storage medium storing program
-
Application No.: US16470096Application Date: 2017-12-14
-
Publication No.: US11358253B2Publication Date: 2022-06-14
- Inventor: Haiyang Xu , Fujihiko Toyomasu
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP2016-244469 20161216,JPJP2017-236998 20171211
- International Application: PCT/JP2017/044843 WO 20171214
- International Announcement: WO2018/110631 WO 20180621
- Main IPC: B08B3/08
- IPC: B08B3/08 ; H01L21/67 ; B08B3/00 ; B24B37/34 ; G01F1/66 ; H01L21/306 ; G01F1/36
Abstract:
A cleaning liquid supply device for supplying a cleaning device with cleaning liquid includes a chemical liquid inlet portion and a dilution water inlet portion, a first chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion, and a second chemical liquid control unit fluidically connected to the chemical liquid inlet portion and the dilution water inlet portion. The first chemical liquid control unit includes a first chemical-liquid-flow-rate control unit, a first dilution-water-flow-rate control unit, and a first mixing portion. The second chemical liquid control unit includes a second chemical-liquid-flow-rate control unit, a second dilution-water-flow-rate control unit, and a second mixing portion.
Public/Granted literature
- US20190314951A1 CLEANING LIQUID SUPPLY DEVICE, CLEANING UNIT, AND STORAGE MEDIUM STORING PROGRAM Public/Granted day:2019-10-17
Information query
IPC分类:
