Invention Grant
- Patent Title: Vacuum robot apparatus for variable pitch access
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Application No.: US17188374Application Date: 2021-03-01
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Publication No.: US11358809B1Publication Date: 2022-06-14
- Inventor: Rajkumar Thanu , Jeffrey C. Hudgens , Karuppasamy Muthukamatchi
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G47/91 ; H01L21/687

Abstract:
Methods, systems, and devices including a robot apparatus with at least one lower arm configured to rotate about a first rotational axis and at least one upper arm rotatably coupled to the at least one lower arm at a second rotational axis that is spaced away from the first rotational axis. The robot apparatus further include a first end effector coupled to the upper arm. The robot apparatus further includes a second end effector coupled to the at least one upper arm. The robot apparatus is suitable for accommodating varying pitches between two adjacent processing chambers or between two adjacent load lock chambers. The robot apparatus may operate in dual substrate handling mode, single substrate handling mode, or a combination thereof. The robot apparatus may also be an off-axis robot.
Information query
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