Invention Grant
- Patent Title: Hard film having excellent wear resistance and toughness
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Application No.: US16643399Application Date: 2018-06-15
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Publication No.: US11359272B2Publication Date: 2022-06-14
- Inventor: Je-hun Park , Seung-su Ahn , Seong-mo Park , Jin-han Gwon , Kyoung-il Kim , Beom-sik Kim , Sun-yong Ahn
- Applicant: KORLOY INC.
- Applicant Address: KR Seoul
- Assignee: KORLOY INC.
- Current Assignee: KORLOY INC.
- Current Assignee Address: KR Seoul
- Agency: Novick, Kim & Lee, PLLC
- Agent Jae Youn Kim; Jihun Kim
- Priority: KR10-2017-0111611 20170901
- International Application: PCT/KR2018/006778 WO 20180615
- International Announcement: WO2019/045235 WO 20190307
- Main IPC: C23C14/06
- IPC: C23C14/06 ; C23C14/32 ; C23C28/00 ; C23C28/04

Abstract:
The present invention relates to a hard film having improved wear resistance and improved toughness. A hard film according to the present invention is formed by using a PVD method on a surface of a base material, wherein: the hard film includes a first hard layer and a second hard layer; the first hard layer has a thickness of approximately 0.1-3.0 μm and is composed of Ti1-aAlaN (0.3≤a≤0.7), and has a single phase structure; and the second hard layer has a thickness of approximately 0.5-10 μm and is composed of Ti1-a-bAlaMebN (0.3≤a≤0.7, 0≤b≤0.05, the Me being at least one selected from V, Zr, Si, Nb, Cr, Mo, Hf, Ta and W); according to an XRD phase analysis method, a ratio ([200]/[111]) of the intensity of a [200] peak to the intensity of a [111] peak is approximately 1.5 or higher; the second hard layer preferentially grows in a [200] direction; the [200] peak is located at approximately 42.7°-44.6° and is composed of three phases, and the [111] peak is located at approximately 37.0°-38.5° and is composed of three phases; and when a peak having a largest intensity among the peaks of the three phases is a main peak and remaining peaks are sub-peaks, a ratio (main peak/sub-peaks) of the intensity of the main peak to the intensities of the sub-peaks in a [200] face is approximately 2 or higher, and a ratio (main peak/sub-peaks) of the intensity of the main peak to the intensities of the sub-peaks in a [111] face is approximately 2 or higher.
Public/Granted literature
- US20210071290A1 HARD FILM HAVING EXCELLENT WEAR RESISTANCE AND TOUGHNESS Public/Granted day:2021-03-11
Information query
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