Vacuum pump and temperature control device
Abstract:
A vacuum pump and a temperature control device are capable of preventing, with a simple configuration, overheating and overcooling of a pump that are caused due to abnormality in a temperature sensor used to control a heater or a water-cooling solenoid valve that is provided to prevent the deposition of products. Problems such as overheating and overcooling of a heater can be avoided in a case where a temperature sensor system fails and consequently the measured temperature continues to be constant between the upper limit and the lower limit. TMS function controls the measured temperature of the temperature sensor to a target temperature. Thus, if an application such as a target to be heated or a heater capacity is identified, the same cycles of turning ON/OFF of the heater or the water-cooling solenoid valve are repeated, and the upper limit of the time in which the ON/OFF state is sustained continuously is determined. An allowed time considering a margin is provided for this upper limit, and the ON/OFF state is changed so that the ON state or the OFF state is not continuously sustained beyond the allowed time.
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