- Patent Title: Apparatus and method for adjusting installation location of temperature sensor configured to measure surface temperature of wafer in semiconductor wafer cleaning apparatus
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Application No.: US16581922Application Date: 2019-09-25
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Publication No.: US11359968B2Publication Date: 2022-06-14
- Inventor: Jongpal Ahn
- Applicant: Jongpal Ahn , AJ TECH CO., LTD.
- Applicant Address: KR Yongin-si; KR Yongin-si
- Assignee: Jongpal Ahn,AJ TECH CO., LTD.
- Current Assignee: Jongpal Ahn,AJ TECH CO., LTD.
- Current Assignee Address: KR Yongin-si; KR Yongin-si
- Agency: Korus Patent, LLC
- Agent Seong Il Jeong
- Priority: KR10-2018-0122351 20181015
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; H01L21/66 ; G01J5/02 ; B08B1/00 ; B24B37/015

Abstract:
Disclosed herein is an apparatus for adjusting the installation location of a temperature sensor configured to measure the surface temperature of a wafer in a semiconductor wafer cleaning apparatus. The apparatus includes: a bracket which is disposed in the upper end of the side wall of each of multi-station processing chambers (MPCs); a first fastening member which fastens a cable; a second fastening member which fastens a temperature sensor; a location adjustment member which fastens and supports the temperature sensor; the temperature sensor which is fixedly coupled to an end of the location adjustment member; a jig which includes a location adjustment plate and a control substrate, and which adjusts the detection location of the temperature sensor; and a controller which is provided with a wafer surface monitoring system configured to separate the surface temperature into a plurality of channels and to display the surface temperature.
Information query
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