Invention Grant
- Patent Title: Method for inspecting insertion states of pins inserted into substrate, and substrate inspection apparatus
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Application No.: US16957321Application Date: 2018-12-28
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Publication No.: US11360159B2Publication Date: 2022-06-14
- Inventor: Dae Sung Koo , Woo Young Lim , Yong Kim
- Applicant: KOH YOUNG TECHNOLOGY INC.
- Applicant Address: KR Seoul
- Assignee: KOH YOUNG TECHNOLOGY INC.
- Current Assignee: KOH YOUNG TECHNOLOGY INC.
- Current Assignee Address: KR Seoul
- Agency: Kile Park Reed & Houtteman PLLC
- Priority: KR10-2017-0182877 20171228,KR10-2018-0170537 20181227
- International Application: PCT/KR2018/016882 WO 20181228
- International Announcement: WO2019/132599 WO 20190704
- Main IPC: G01R31/66
- IPC: G01R31/66

Abstract:
A substrate inspection apparatus may include a communication circuit, a plurality of light sources, an image sensor, at least one memory, and at least one processor. The processor may be configured to generate pin insertion state information indicating an insertion state of each of a plurality of first pins by using a pattern light reflected from each of the plurality of first pins, detect at least one second pin having an insertion defect from among the plurality of first pins by using at least one of the pin insertion reference information and the pin insertion state information of each of the plurality of first pins, generate a control signal for adjusting at least one first process parameter among a plurality of process parameters of the pin insertion apparatus, and control the communication circuit to transmit the control signal to the pin insertion apparatus.
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