Invention Grant
- Patent Title: Transport system having a magnetically levitated transportation stage
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Application No.: US16490206Application Date: 2018-05-21
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Publication No.: US11360400B2Publication Date: 2022-06-14
- Inventor: David L. Trumper , Lei Zhou , Ruvinda Gunawardana
- Applicant: Massachusetts Institute of Technology , ASML Netherlands BV
- Applicant Address: US MA Cambridge; NL AH Veldhoven
- Assignee: Massachusetts Institute of Technology,ASML Netherlands BV
- Current Assignee: Massachusetts Institute of Technology,ASML Netherlands BV
- Current Assignee Address: US MA Cambridge; NL AH Veldhoven
- Agency: Daly, Crowley, Mofford & Durkee LLP
- International Application: PCT/US2018/033662 WO 20180521
- International Announcement: WO2018/213825 WO 20181122
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H02K41/03
Abstract:
A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.
Public/Granted literature
- US20220004110A1 Transport System Having a Magnetically Levitated Transportation Stage Public/Granted day:2022-01-06
Information query
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