Invention Grant
- Patent Title: Multi-cathode processing chamber with dual rotatable shields
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Application No.: US16849910Application Date: 2020-04-15
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Publication No.: US11361950B2Publication Date: 2022-06-14
- Inventor: John Joseph Mazzocco , Cory Eugene Lafollett
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34

Abstract:
Embodiments of a process kits for use in a process chamber are provided herein. In some embodiments, a process kit for use in a multi-cathode processing chamber includes: a first rotatable shield coupled to a first shaft, wherein the first rotatable shield includes a base, a conical portion extending downward and radially outward from the base, and one or more holes formed through the conical portion, wherein no two holes of the one or more holes are diametrically opposed; and a second rotatable shield coupled to a second shaft concentric with the first shaft, wherein the second rotatable shield is disposed in the first rotatable shield, and wherein the first rotatable shield is configured to rotate independent of the first rotatable shield.
Public/Granted literature
- US20210327692A1 MULTI-CATHODE PROCESSING CHAMBER WITH DUAL ROTATABLE SHIELDS Public/Granted day:2021-10-21
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