Invention Grant
- Patent Title: Sidewall spacer structure enclosing conductive wire sidewalls to increase reliability
-
Application No.: US16887475Application Date: 2020-05-29
-
Publication No.: US11362030B2Publication Date: 2022-06-14
- Inventor: Yu-Teng Dai , Chung-Ju Lee , Chih Wei Lu , Hsin-Chieh Yao , Hsi-Wen Tien , Wei-Hao Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/522 ; H01L23/532 ; H01L21/768 ; H01L23/528

Abstract:
Some embodiments relate to a semiconductor structure including a first inter-level dielectric (ILD) layer overlying a substrate. A lower conductive via is disposed within the first ILD layer. A plurality of conductive wires overlie the first ILD layer. A second ILD layer is disposed laterally between the conductive wires, where the second ILD layer comprises a first material. A sidewall spacer structure is disposed between the second ILD layer and the plurality of conductive wires. The sidewall spacer structure continuously extends along opposing sidewalls of each conductive wire. A top surface of the sidewall spacer structure is vertically above a top surface of the plurality of conductive wires, and the sidewall spacer structure comprises a second material different from the first material.
Public/Granted literature
- US20210375751A1 SIDEWALL SPACER STRUCTURE ENCLOSING CONDUCTIVE WIRE SIDEWALLS TO INCREASE RELIABILITY Public/Granted day:2021-12-02
Information query
IPC分类: