Invention Grant
- Patent Title: Semiconductor device having a laminate contact plug of specified configuration including a conductive metal oxide layer
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Application No.: US16979244Application Date: 2019-03-28
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Publication No.: US11362034B2Publication Date: 2022-06-14
- Inventor: Tetsuya Kakehata , Yuta Endo
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JPJP2018-072258 20180404
- International Application: PCT/IB2019/052519 WO 20190328
- International Announcement: WO2019/193463 WO 20191010
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768

Abstract:
A semiconductor device that is miniaturized and highly integrated is provided. One embodiment of the present invention is a semiconductor device including a first insulator, a second insulator, a first conductor, a second conductor, and a semiconductor layer; the first insulator includes an opening exposing the semiconductor layer; the first conductor is provided in contact with the semiconductor layer at a bottom of the opening; the second insulator is provided in contact with a top surface of the first conductor and a side surface in the opening; the second conductor is provided in contact with the top surface of the first conductor and in the opening with the second insulator therebetween; and the second insulator has a barrier property against oxygen.
Information query
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