Invention Grant
- Patent Title: Semiconductor memory device
-
Application No.: US16916989Application Date: 2020-06-30
-
Publication No.: US11362104B2Publication Date: 2022-06-14
- Inventor: Byung Woo Kang , Min Sung Ko , Gwang Been Kim , Hwal Pyo Kim , Jin Taek Park , Young Ock Hong
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0140451 20191105
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L23/48 ; H01L27/11573 ; H01L27/11565

Abstract:
A semiconductor memory device includes a substrate including a peripheral circuit, a stepped dummy stack overlapping the substrate and including a plurality of steps extending in a first direction, a plurality of contact groups passing through the stepped dummy stack, and upper lines respectively connected to the contact groups. The contact groups include a first contact group having two or more first contact plugs arranged in the first direction. The upper lines include a first upper line commonly connected to the first contact plugs.
Public/Granted literature
- US20210134823A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-05-06
Information query
IPC分类: