Invention Grant
- Patent Title: Nonvolatile memory device having a ferroelectric layer
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Application No.: US16891469Application Date: 2020-06-03
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Publication No.: US11362107B2Publication Date: 2022-06-14
- Inventor: Jae Hyun Han , Se Ho Lee , Hyangkeun Yoo , Jae Gil Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2019-0163140 20191209
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L29/788 ; H01L29/78 ; H01L29/786 ; H01L27/11587

Abstract:
A nonvolatile memory device according to an embodiment includes a substrate having an upper surface, a source electrode structure disposed on the substrate, and a channel structure disposed over the substrate and disposed to contact one sidewall surface of the source electrode structure. In addition, the nonvolatile memory device includes a drain electrode structure disposed to contact one sidewall surface of the channel structure over the substrate. In addition, the nonvolatile memory device includes a plurality of ferroelectric structures extending in a first direction perpendicular to the substrate in the channel structure and disposed to be spaced apart from each other along the second direction perpendicular to the first direction. In addition, the nonvolatile memory device includes a gate electrode structure disposed in each of the plurality of ferroelectric structure to extend along the first direction.
Public/Granted literature
- US20210175252A1 NONVOLATILE MEMORY DEVICE HAVING A FERROELECTRIC LAYER Public/Granted day:2021-06-10
Information query
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