Invention Grant
- Patent Title: Manufacturing method of array substrate, array substrate, and display device
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Application No.: US16644988Application Date: 2020-01-06
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Publication No.: US11362117B2Publication Date: 2022-06-14
- Inventor: Tian Ou
- Applicant: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: The Roy Gross Law Firm, LLC
- Agent Roy Gross
- Priority: CN201911341006.4 20191223
- International Application: PCT/CN2020/070418 WO 20200106
- International Announcement: WO2021/128454 WO 20210701
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/49 ; G02F1/1335 ; G02F1/1368 ; G02F1/1362

Abstract:
The present application provides a method of manufacturing an array substrate, the array substrate, and a display device. In the method, a photoresist layer is removed by a plasma cleaning technique after performing etching to prevent a gate electrode of the array substrate from contacting a stripping solution, thereby preventing a metal layer of the gate electrode from being corroded by the stripping solution.
Public/Granted literature
- US20210193696A1 MANUFACTURING METHOD OF ARRAY SUBSTRATE, ARRAY SUBSTRATE, AND DISPLAY DEVICE Public/Granted day:2021-06-24
Information query
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