Invention Grant
- Patent Title: Nonvolatile memory device having three-dimensional structure
-
Application No.: US16941155Application Date: 2020-07-28
-
Publication No.: US11362143B2Publication Date: 2022-06-14
- Inventor: Jae Hyun Han , Hyangkeun Yoo , Se Ho Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Priority: KR10-2020-0017890 20200213
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L29/06 ; H01L27/1159 ; H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L27/11597 ; H01L29/423 ; H01L21/28

Abstract:
A nonvolatile memory device according to an embodiment includes a substrate, and a gate structure disposed on the substrate and including a hole pattern. The gate structure includes at least one gate electrode layer and at least one interlayer insulation layer which are alternately stacked, and the gate electrode layer protrudes toward a center of the hole pattern relative to the interlayer insulation layer. The nonvolatile memory device includes a first functional layer disposed along a sidewall surface of the gate structure inside the hole pattern, a second functional layer disposed on the first functional layer inside the hole pattern, and a channel layer extending in a direction perpendicular to the substrate inside the hole pattern and disposed to contact a cell portion of the second functional layer. The cell portion of the second functional layer indirectly covers a sidewall surface of the gate electrode layer.
Public/Granted literature
- US20210257407A1 NONVOLATILE MEMORY DEVICE HAVING THREE-DIMENSIONAL STRUCTURE Public/Granted day:2021-08-19
Information query
IPC分类: