Invention Grant
- Patent Title: Bulk acoustic wave resonator with a heatsink region and electrical insulator region
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Application No.: US16997450Application Date: 2020-08-19
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Publication No.: US11362638B2Publication Date: 2022-06-14
- Inventor: Gilles Moulard
- Applicant: RF360 EUROPE GMBH
- Applicant Address: DE Munich
- Assignee: RF360 EUROPE GMBH
- Current Assignee: RF360 EUROPE GMBH
- Current Assignee Address: DE Munich
- Agency: RF360 Europe GmbH
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13 ; H03H9/17 ; H03H9/54

Abstract:
Certain aspects of the present disclosure provide a bulk acoustic wave (BAW) resonator having a substrate with a heatsink region and an electrical insulator region. An example electroacoustic device generally includes a piezoelectric layer, a first electrode structure, a second electrode structure, one or more reflector layers, and a substrate having a heatsink region and an electrical insulator region. The heatsink region is arranged under a first portion of the first electrode structure, the first portion of the first electrode structure overlapping the second electrode structure. The insulator region is arranged under a second portion of the first electrode structure, the second portion of the first electrode structure being adjacent to the first portion of the first electrode structure.
Public/Granted literature
- US20220060165A1 BULK ACOUSTIC WAVE RESONATOR WITH A HEATSINK REGION AND ELECTRICAL INSULATOR REGION Public/Granted day:2022-02-24
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