Invention Grant
- Patent Title: Load port
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Application No.: US16907530Application Date: 2020-06-22
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Publication No.: US11367638B2Publication Date: 2022-06-21
- Inventor: Yu-Min Chu , Cho-Chun Chung , Chia-Hsiu Huang
- Applicant: E&R ENGINEERING CORPORATION
- Applicant Address: TW Kaohsiung
- Assignee: E&R ENGINEERING CORPORATION
- Current Assignee: E&R ENGINEERING CORPORATION
- Current Assignee Address: TW Kaohsiung
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: TW109205496 20200507
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; G01L5/00

Abstract:
A load port adapted for wafer cassettes of different sizes detects storage states of wafers stored in the wafer cassettes. The load port includes a body, a positioning mechanism, a sensing mechanism, and a detecting mechanism. The body has a carrier base. The positioning mechanism is disposed on the body and has a positioning unit disposed on the carrier base, a hooking unit, and a limiting unit. The hooking unit is disposed in the body and has a driving assembly and a hooking element. The driving assembly is disposed in the body. The hooking element is mounted to the driving assembly. The sensing mechanism is disposed on the carrier base. The detecting mechanism is disposed on the body, detects the storage states of wafers stored in the wafer cassette, and has a first detecting assembly and a second detecting assembly spaced apart from each other.
Public/Granted literature
- US20210351052A1 LOAD PORT Public/Granted day:2021-11-11
Information query
IPC分类: