Invention Grant
- Patent Title: Temperature tunable multi-zone electrostatic chuck
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Application No.: US16352349Application Date: 2019-03-13
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Publication No.: US11367645B2Publication Date: 2022-06-21
- Inventor: Phillip Criminale , Zhiqiang Guo , Andrew Myles
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67 ; H01L21/66 ; H05B1/02

Abstract:
Implementations described herein provide a method for calibrating a temperature of a substrate support assembly which enables discrete tuning of the temperature profile of a substrate support assembly. In one embodiment, a system, comprises a memory, wherein the memory includes an application program configured to perform an operation on a substrate support assembly, a control board disposed in a substrate support assembly, wherein the control board comprises a processor having an wireless interface, a pulse width modification (PWM) heater controller, wherein the processor is connected with the memory to read and access the application program from the memory when in operation, and a heating element coupled to the pulse width modification (PWM) heater controller, wherein the heating element comprises a plurality of spatially tunable heaters that are individually tunable by the pulse width modification (PWM) heater controller.
Public/Granted literature
- US20200294836A1 TEMPERATURE TUNABLE MULTI-ZONE ELECTROSTATIC CHUCK Public/Granted day:2020-09-17
Information query
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