Invention Grant
- Patent Title: Systems and methods for improving within die co-planarity uniformity
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Application No.: US16572920Application Date: 2019-09-17
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Publication No.: US11367653B2Publication Date: 2022-06-21
- Inventor: Paul McHugh , Kwan Wook Roh , Gregory J. Wilson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/288 ; G06F30/394 ; H01L23/522

Abstract:
Exemplary methods of producing a semiconductor substrate may include characterizing a substrate pattern to identify a zonal distribution of a plurality of vias and a height and a radius of each via of the plurality of vias. The methods may include determining a fill rate for each via within the zonal distribution of the plurality of vias. The methods may include modifying a die pattern to adjust via fill rates between two zones of vias. The methods may also include producing a substrate according to the die pattern.
Public/Granted literature
- US20200098628A1 SYSTEMS AND METHODS FOR IMPROVING WITHIN DIE CO-PLANARITY UNIFORMITY Public/Granted day:2020-03-26
Information query
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