Invention Grant
- Patent Title: Semiconductor structure and formation method thereof
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Application No.: US17249487Application Date: 2021-03-03
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Publication No.: US11367774B2Publication Date: 2022-06-21
- Inventor: Fei Zhou
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai; CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai; CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN202010146491.6 20200305
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/522 ; H01L23/552 ; H01L49/02

Abstract:
A semiconductor structure and a fabrication method of the semiconductor structure are provided in the present disclosure. The semiconductor structure includes a substrate, where the substrate includes a shielding region having a first area; a first shielding layer on the substrate, where a first shielding structure is in the first shielding layer of the shielding region, and the first shielding structure has a first density; a second shielding layer on the first shielding layer, where a second shielding structure is in the second shielding layer of the shielding region, and the second shielding structure has a second density which is less than the first density; and an electrical interconnection structure, electrically interconnecting the first shielding structure with the second shielding structure and enabling the first shielding structure grounded.
Public/Granted literature
- US20210280669A1 SEMICONDUCTOR STRUCTURE AND FORMATION METHOD THEREOF Public/Granted day:2021-09-09
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