Invention Grant
- Patent Title: Reinforcement ring for carrier head with flexible membrane
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Application No.: US16354072Application Date: 2019-03-14
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Publication No.: US11370079B2Publication Date: 2022-06-28
- Inventor: Jeonghoon Oh , Jamie Leighton
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B37/27 ; H01L21/67 ; H01L21/321 ; H01L21/304
Abstract:
A reinforcement ring can be placed in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring has a substantially vertical cylindrical portion, a flange projecting outwardly from the bottom of the cylindrical portion, and a lip projecting outwardly from a top of the cylindrical portion. The flange projects outwardly farther than the lip.
Public/Granted literature
- US20190210181A1 REINFORCEMENT RING FOR CARRIER HEAD WITH FLEXIBLE MEMBRANE Public/Granted day:2019-07-11
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