Invention Grant
- Patent Title: Seed crystal holder for pulling up single crystal and method of manufacturing silicon single crystal using the same
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Application No.: US17039060Application Date: 2020-09-30
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Publication No.: US11371160B2Publication Date: 2022-06-28
- Inventor: Eiichi Kawasaki
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2015-079864 20150409
- Main IPC: C30B15/32
- IPC: C30B15/32 ; C30B29/06 ; B32B18/00 ; C04B35/83 ; C30B15/00
Abstract:
A seed crystal holder for pulling up a single crystal is made of a carbon fiber-reinforced carbon composite material, and has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal. A direction of carbon fibers at a part in contact with at least an outer peripheral surface of the seed crystal has isotropy as viewed from a central axis of the hollow space.
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