Invention Grant
- Patent Title: Method for producing thin film, thin film forming material, optical thin film, and optical member
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Application No.: US16038824Application Date: 2018-07-18
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Publication No.: US11372136B2Publication Date: 2022-06-28
- Inventor: Gentaro Tanaka , Hirofumi Tanaka
- Applicant: NICHIA CORPORATION
- Applicant Address: JP Anan
- Assignee: NICHIA CORPORATION
- Current Assignee: NICHIA CORPORATION
- Current Assignee Address: JP Anan
- Agency: Hunton Andrews Kurth LLP
- Priority: JPJP2017-140214 20170719
- Main IPC: G02B1/11
- IPC: G02B1/11 ; C23C14/24 ; G02B1/113 ; C03C17/34 ; C23C14/08 ; C01B33/113 ; C23C14/58 ; C03C17/245 ; C03C17/00

Abstract:
Disclosed are a method for producing an optical thin film having a low refractive index, a thin film forming material, an optical thin film, and an optical member. The method for producing an optical thin film includes forming a vapor deposition film by depositing a thin film forming material on an object in a non-oxidizing atmosphere by a physical vapor deposition method; and bringing the vapor deposition film into contact with a first acidic solution comprising an acidic substance in a range of pH 2.5 or more and pH 3.5 or less to obtain a first thin film having voids, wherein the thin film forming material is a mixture comprising indium oxide and silicon oxide, in which the indium oxide is in a range of 0.230 mol or more and 0.270 mol or less with respect to 1 mol of the silicon oxide.
Public/Granted literature
- US20190025466A1 METHOD FOR PRODUCING THIN FILM, THIN FILM FORMING MATERIAL, OPTICAL THIN FILM, AND OPTICAL MEMBER Public/Granted day:2019-01-24
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