Invention Grant
- Patent Title: Systems and methods for repetitive tuning of matching networks
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Application No.: US17035392Application Date: 2020-09-28
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Publication No.: US11373844B2Publication Date: 2022-06-28
- Inventor: Gary Russell , Keith Rouse , Dean Maw
- Applicant: COMET TECHNOLOGIES USA, INC.
- Applicant Address: US CA San Jose
- Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee Address: US CA San Jose
- Agency: Nolte Lackenback Siegel
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46
Abstract:
A method for repetitive tuning of a matching network in a radio frequency plasma processing device, the method including detecting a condition within the matching network and determining if the condition is a known condition for the matching network. Also, finding a prior solution and to the condition when the condition is the known condition for the matching network; and replicating the prior solution for the condition in the matching network.
Public/Granted literature
- US20220102115A1 SYSTEMS AND METHODS FOR REPETITIVE TUNING OF MATCHING NETWORKS Public/Granted day:2022-03-31
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