Invention Grant
- Patent Title: Bonding wire for semiconductor device
-
Application No.: US16958633Application Date: 2017-12-28
-
Publication No.: US11373934B2Publication Date: 2022-06-28
- Inventor: Daizo Oda , Takashi Yamada , Motoki Eto , Teruo Haibara , Tomohiro Uno
- Applicant: NIPPON MICROMETAL CORPORATION , NIPPON STEEL Chemical & Material Co., Ltd.
- Applicant Address: JP Saitama; JP Tokyo
- Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL Chemical & Material Co., Ltd.
- Current Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL Chemical & Material Co., Ltd.
- Current Assignee Address: JP Saitama; JP Tokyo
- Agency: McDermott Will & Emery LLP
- International Application: PCT/JP2017/047331 WO 20171228
- International Announcement: WO2019/130570 WO 20190704
- Main IPC: H01L23/49
- IPC: H01L23/49 ; H01L23/29 ; H01L23/00

Abstract:
Provided is a Pd coated Cu bonding wire for a semiconductor device capable of sufficiently obtaining bonding reliability of a ball bonded portion in a high temperature environment of 175° C. or more, even when the content of sulfur in the mold resin used in the semiconductor device package increases.
The bonding wire for a semiconductor device comprises a Cu alloy core material; and a Pd coating layer formed on a surface of the Cu alloy core material; and contains 0.03 to 2% by mass in total of one or more elements selected from Ni, Rh, Ir and Pd in the bonding wire and further 0.002 to 3% by mass in total of one or more elements selected from Li, Sb, Fe, Cr, Co, Zn, Ca, Mg, Pt, Sc and Y. The bonding wire can be sufficiently obtained bonding reliability of a ball bonded portion in a high temperature environment of 175° C. or more, even when the content of sulfur in the mold resin used in the semiconductor device package increases by being used.
The bonding wire for a semiconductor device comprises a Cu alloy core material; and a Pd coating layer formed on a surface of the Cu alloy core material; and contains 0.03 to 2% by mass in total of one or more elements selected from Ni, Rh, Ir and Pd in the bonding wire and further 0.002 to 3% by mass in total of one or more elements selected from Li, Sb, Fe, Cr, Co, Zn, Ca, Mg, Pt, Sc and Y. The bonding wire can be sufficiently obtained bonding reliability of a ball bonded portion in a high temperature environment of 175° C. or more, even when the content of sulfur in the mold resin used in the semiconductor device package increases by being used.
Public/Granted literature
- US20200373226A1 BONDING WIRE FOR SEMICONDUCTOR DEVICE Public/Granted day:2020-11-26
Information query
IPC分类: