Invention Grant
- Patent Title: Semiconductor device having a redistribution line
-
Application No.: US16746768Application Date: 2020-01-17
-
Publication No.: US11373970B2Publication Date: 2022-06-28
- Inventor: Anhao Cheng , Chun-Chang Liu , Sheng-Wei Yeh
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/528 ; H01L23/532 ; H01L21/02 ; H01L23/31

Abstract:
A semiconductor device includes a first passivation layer over a substrate. The semiconductor device further includes at least two post passivation interconnect (PPI) lines over the first passivation layer, wherein a top portion of each of the at least two PPI lines has a rounded shape. The semiconductor device further includes a second passivation layer configured to stress the at least two PPI lines. The semiconductor device further includes a polymer material over the second passivation layer and filling a trench between adjacent PPI lines of the at least two PPI lines.
Public/Granted literature
- US20200152589A1 SEMICONDUCTOR DEVICE HAVING A REDISTRIBUTION LINE Public/Granted day:2020-05-14
Information query
IPC分类: