Invention Grant
- Patent Title: Trench capacitor with lateral protrusion structure
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Application No.: US16814142Application Date: 2020-03-10
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Publication No.: US11374000B2Publication Date: 2022-06-28
- Inventor: Ru-Liang Lee , Ming Chyi Liu , Shih-Chang Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/08
- IPC: H01L27/08 ; H01L27/108 ; H01L49/02

Abstract:
Various embodiments of the present application are directed towards a semiconductor device comprising a trench capacitor, the trench capacitor comprising a plurality of lateral protrusions. In some embodiments, the trench capacitor comprises a dielectric structure over a substrate. The dielectric structure may comprise a plurality of dielectric layers overlying the substrate. The dielectric structure may comprise a plurality of lateral recesses. In some embodiments, the plurality of lateral protrusions extend toward and fill the plurality of lateral recesses. By forming the trench capacitor with the plurality of lateral protrusions filling the plurality of lateral recesses, the surface area of the capacitor is increased without increasing the depth of the trench. As a result, greater capacitance values may be achieved without necessarily increasing the depth of the trench and thus, without necessarily increasing the size of the semiconductor device.
Public/Granted literature
- US20210288047A1 TRENCH CAPACITOR WITH LATERAL PROTRUSION STRUCUTRE Public/Granted day:2021-09-16
Information query
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