Invention Grant
- Patent Title: Semiconductor storage device and electronic apparatus
-
Application No.: US16754696Application Date: 2018-08-23
-
Publication No.: US11374013B2Publication Date: 2022-06-28
- Inventor: Masanori Tsukamoto
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Chip Law Group
- Priority: JPJP2017-200957 20171017
- International Application: PCT/JP2018/031209 WO 20180823
- International Announcement: WO2019/077876 WO 20190425
- Main IPC: H01L27/11507
- IPC: H01L27/11507 ; H01L27/11504 ; H01L21/265
Abstract:
Provided is a semiconductor storage device and an electronic apparatus having a structure that is more suitable for miniaturization and high integration of memory cells. A semiconductor storage device includes: a recessed portion provided in a semiconductor substrate; a ferroelectric film provided along an inner side of the recessed portion; an electrode provided on the ferroelectric film so as to be embedded in the recessed portion; a first conductivity-type separation region provided in the semiconductor substrate under the recessed portion; and a second conductivity-type electrode region provided in the semiconductor substrate on at least one side of the recessed portion.
Public/Granted literature
- US20200243550A1 SEMICONDUCTOR STORAGE DEVICE AND ELECTRONIC APPARATUS Public/Granted day:2020-07-30
Information query
IPC分类:
