Invention Grant
- Patent Title: Oxide semiconductor thin film transistor and method of fabricating the same
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Application No.: US16546904Application Date: 2019-08-21
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Publication No.: US11374129B2Publication Date: 2022-06-28
- Inventor: Jin Jang , Su Hui Lee
- Applicant: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- Applicant Address: KR Yongin-si
- Assignee: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- Current Assignee: UNIVERSITY-INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY
- Current Assignee Address: KR Yongin-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2018-0098100 20180822
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/417 ; H01L29/06 ; H01L29/41

Abstract:
Disclosed are an oxide semiconductor thin film transistor and a method of fabricating the same. An oxide semiconductor thin film transistor according to an embodiment of the present disclosure includes a substrate; a first gate electrode formed on the substrate; a gate insulator formed on the first gate electrode; an oxide semiconductor layer formed on the gate insulator; source and drain electrodes formed by depositing carbon nanotubes (CNTs) and a metal electrode on the formed the oxide semiconductor layer and patterning the deposited CNTs and metal electrode such that the source electrode and the drain electrode are spaced apart from each other; and a passivation layer formed on the formed source and drain electrodes, wherein the source and drain electrodes serve to prevent diffusion of a metal of the metal electrode into the formed oxide semiconductor layer, due to the CNTs of the source and drain electrodes.
Public/Granted literature
- US20200066913A1 OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2020-02-27
Information query
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