Invention Grant
- Patent Title: Fin-based photodetector structure
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Application No.: US16740664Application Date: 2020-01-13
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Publication No.: US11374143B2Publication Date: 2022-06-28
- Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian , Steven Shank
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L31/103
- IPC: H01L31/103 ; G02B6/13 ; H01L31/0392 ; G02B6/12

Abstract:
One illustrative photodetector disclosed herein includes an N-doped waveguide structure defined in a semiconductor material, the N-doped waveguide structure comprising a plurality of first fins, and a detector structure positioned on the N-doped waveguide structure, wherein a portion of the detector structure is positioned laterally between the plurality of first fins. In this example, the photodetector also includes at least one N-doped contact region positioned in the semiconductor material and a P-doped contact region positioned in the detector structure.
Public/Granted literature
- US20210217916A1 FIN-BASED PHOTODETECTOR STRUCTURE Public/Granted day:2021-07-15
Information query
IPC分类: