Invention Grant
- Patent Title: Organic vapor jet deposition using an exhaust
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Application No.: US12974070Application Date: 2010-12-21
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Publication No.: US11374172B2Publication Date: 2022-06-28
- Inventor: Stephen Forrest , Richard Lunt
- Applicant: Stephen Forrest , Richard Lunt
- Applicant Address: US MI Ann Arbor; US MI Ann Arbor
- Assignee: Stephen Forrest,Richard Lunt
- Current Assignee: Stephen Forrest,Richard Lunt
- Current Assignee Address: US MI Ann Arbor; US MI Ann Arbor
- Agency: Riverside Law LLP
- Main IPC: C23C14/12
- IPC: C23C14/12 ; C23C16/455 ; C23C16/44 ; C23C14/24 ; H01L51/00

Abstract:
Methods and systems for organic vapor jet deposition are provided, where an exhaust is disposed between adjacent nozzles. The exhaust may reduce pressure buildup in the nozzles and between the nozzles and the substrate, leading to improved deposition profiles, resolution, and improved nozzle-to-nozzle uniformity. The exhaust may be in fluid communication with an ambient vacuum, or may be directly connected to a vacuum source.
Public/Granted literature
- US20110088621A1 Organic Vapor Jet Deposition Using an Exhaust Public/Granted day:2011-04-21
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