Invention Grant
- Patent Title: Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
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Application No.: US17081717Application Date: 2020-10-27
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Publication No.: US11374549B2Publication Date: 2022-06-28
- Inventor: Ventsislav Yantchev
- Applicant: Resonant Inc.
- Applicant Address: US CA Goleta
- Assignee: Resonant Inc.
- Current Assignee: Resonant Inc.
- Current Assignee Address: US CA Goleta
- Agency: SoCal IP Law Group LLP
- Agent Angelo Gaz
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/04 ; H03H9/13 ; H03H9/17 ; H03H9/56 ; H03H3/02

Abstract:
Acoustic filters and methods of fabrication are disclosed. A filter device includes a substrate and a single-crystal piezoelectric plate, a back surface of the piezoelectric plate attached to a surface of the substrate. The filter device includes a plurality of acoustic resonators including one or more shunt resonators and one or more series resonators. Each of the plurality of acoustic resonators includes an interdigital transducer (IDT) formed on the front surface of the piezoelectric plate, interleaved fingers of the IDT disposed on a respective diaphragm formed by a respective portion of the piezoelectric plate that spans a respective cavity in the substrate. A divided frequency setting layer is formed on at least some of the one or more shunt resonators but not on the one or more series resonators.
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