Invention Grant
- Patent Title: Capacitive device and piezoelectric device
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Application No.: US16534012Application Date: 2019-08-07
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Publication No.: US11376628B2Publication Date: 2022-07-05
- Inventor: Taiichi Takezaki , Hiroaki Hasegawa , Shuntaro Machida
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JPJP2018-165730 20180905
- Main IPC: B06B1/02
- IPC: B06B1/02 ; G01N29/24 ; A61B8/00 ; B06B1/06

Abstract:
A capacitive device includes a unit cell including a CMUT, and a transmission/reception plate for impedance matching which is provided above the unit cell via a connection portion, in which a membrane of the CMUT constituting the unit cell is connected to the transmission/reception plate via the connection portion having an area smaller than that of the transmission/reception plate. The area of the transmission/reception plate is desirably larger than the area of a hollow portion of the CMUT.
Public/Granted literature
- US20200070205A1 Capacitive Device and Piezoelectric Device Public/Granted day:2020-03-05
Information query
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